YUJI AMERICA CORP.
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SaFluo 13I1 Etching Gas
CF3I | Semiconductor Etching Gas
Iodotrifluoromethane (CF3I) is an environmentally friendly dry etching gas with low GWP，mainly used in front end etching process of flash memory chips manufacturing.
Product Availability
Sample | Available |
Commercial | Available |
ISO Tank | Available |
Custom Packaging | Upon Request |
Product Description
Chemical Name | Iodotrifluoromethane |
Synonyms | Trifluoroiodomethane |
CAS # | 2314-97-8 |
ELINCS # (EU) | 219-014-5 |
Molecular Formula | CF3I |
Structure | CF3-I |
Molecular Weight | 195.91 |
Physical State | Gas |
Color | Colorless |
Odor | Odorless |
ODP（CFC-11 = 1） | 0 |
GWP100（CO2 = 1） | 5 |
Life Time (Days) | 2 |
TWA（8-hr） | 150 ppm |
Product Properties
Chemical Name | Iodotrifluoromethane |
Boiling Point(℃) | -22.5 |
Melting Point(℃) | -110 |
Liquid Density（@25℃） | 2.096 |
Vapor Pressure（@20℃，MPa） | 0.472 |
Critical Temperature（℃） | 122 |
Critical Pressure（MPa） | 4.04 |
Critical Volume（cm3/mole） | 225 |
Flash Point（℃） | Not applicable |
Flammability（@21℃） | Not applicable |
Explosion Limit（%vol) | Not applicable |