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Laboratory

Electronic Gas

Electronic gases are specialized chemicals used in the manufacturing of semiconductors, playing a crucial role in processes such as deposition, etching, and doping. These gases include silane (SiH₄), ammonia (NH₃), nitrogen trifluoride (NF₃), and others, each serving specific functions in creating and manipulating semiconductor materials.

Trifluoromethane
Hexafluoropropylene
NF3
C4F6
3,3,3,4,4,4-Hexafluoroisobutylene
Difluoromethane
COF2
Acetylene
Pentafluoroethane
Octafluorocyclobutane
Hydrogen Bromide
Propylene
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