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Laboratory

Electronic Gas

Electronic gases are specialized chemicals used in the manufacturing of semiconductors, playing a crucial role in processes such as deposition, etching, and doping. These gases include silane (SiH₄), ammonia (NH₃), nitrogen trifluoride (NF₃), and others, each serving specific functions in creating and manipulating semiconductor materials.

3,3,3,4,4,4-Hexafluoroisobutylene
Difluoromethane
NF3
Acetylene
Ethylene
Nitrous Oxide
C4F6
Hexafluoropropylene
Octafluorocyclobutane
COF2
Hydrogen Bromide
Octafluoropropane
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