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Plasma Etching Gas

Octafluoropropane is an important etching gas in the plasma etching process of the electronics industry.

Product Availability

Sample

Available

Commercial

Available

ISO Tank

Available

Custom Packaging

Upon Request


Product Description

Chemical Name

Octafluoropropane

Synonyms

Perfluoropropane, Freon 218, RC 218, PFC 218,

R-218, Flutec PP30, Genetron 218

CAS #

76-19-7

ELINCS # (EU)

200-941-9

Molecular Formula

C3F8

Structure

CCF3CF2CF3

Molecular Weight

188.02

ODP(CFC-11 = 1)

0

GWP100(CO2 = 1)

8830

Atmospheric Life Time (Years)

2600

TWA(8-hr, mg/m³)

2.5


Product Description

Chemical Name

Octafluoropropane

Synonyms

Perfluoropropane, Freon 218, RC 218, PFC 218,

R-218, Flutec PP30, Genetron 218

CAS #

76-19-7

ELINCS # (EU)

200-941-9

Molecular Formula

C3F8

Structure

CCF3CF2CF3

Molecular Weight

188.02

ODP(CFC-11 = 1)

0

GWP100(CO2 = 1)

8830

Atmospheric Life Time (Years)

2600

TWA(8-hr, mg/m³)

2.5


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