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Octafluoropropane
Plasma Etching Gas
Octafluoropropane is an important etching gas in the plasma etching process of the electronics industry.
Product Availability
Sample | Available |
Commercial | Available |
ISO Tank | Available |
Custom Packaging | Upon Request |
Product Description
Chemical Name | Octafluoropropane |
Synonyms | Perfluoropropane, Freon 218, RC 218, PFC 218, R-218, Flutec PP30, Genetron 218 |
CAS # | 76-19-7 |
ELINCS # (EU) | 200-941-9 |
Molecular Formula | C3F8 |
Structure | CCF3CF2CF3 |
Molecular Weight | 188.02 |
ODP（CFC-11 = 1） | 0 |
GWP100（CO2 = 1） | 8830 |
Atmospheric Life Time (Years) | 2600 |
TWA（8-hr, mg/m³） | 2.5 |
Product Properties
Chemical Name | Octafluoropropane |
Boiling Point(℃) | -36.7 |
Melting Point（℃） | -183 |
Liquid Density（-36.7℃, g/cm3） | 1.6 |
Vapor Density (Air=1) | 6.683 |
Saturated Vapor Pressure（21.1℃, kPa） | 792 |
Critical Temperature（℃） | 71.9 |
Critical Pressure（kPA） | 2680 |
Solubility in Water (15℃, mg/L) | 5.7 |
Flash Point（℃） | Not applicable (non-flammable) |
Flammability (@21℃) | Not applicable (non-flammable) |
Explosion Limit（%vol) | Not applicable (non-flammable) |